Official NUC CCMAS syllabus
Sage already knows this exact syllabus — ask it anything about Introduction to Micro-electromechanical Systems, generate practice questions in your exam's format, and get a cram sheet that works offline.
Start studying SSG 433 free →Overview of microelectromechanical systems (MEMS). Use of MEMS with radio frequency, optical and biomedical devices. Basic MEMS building blocks; cantilever and clamped-clamped beams. Actuation mechanisms of mechanical, thermal and electrostatic microdevices. The thin film fabrication process, deposition, lithography, etching and release. MEMS in circuits, switches, capacitors, and resonators. Prerequisites: SSG 350, SSG 321. Corequisite SSG 438
Source: the Nigerian Universities Commission (NUC) Core Curriculum and Minimum Academic Standards (CCMAS). StudyOps loads this syllabus automatically when you study SSG 433.